Computer Science does not offer a terminal master’s degree. Harvard offers two master’s degrees in Computational Science and Engineering which may be of interest to applicants who wish to apply directly to a master’s program.
An S.M. degree can only be earned en-route to the Ph.D. degree or via the A.B./S.M. program, which is only open to Harvard Undergraduates. The requirements for the CS S.M. degree can be found on the SEAS S.M. requirements page.